Low Temperature Processed Hafnium Oxide: Structural and Electrical Properties

AuthID
 P-004-FWM
4
Author(s)
Document Type
Article
Year published
2006
Published
in MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, ISSN: 1369-8001
Volume: 9, Issue: 6, Pages: 1125-1132 (8)
Conference
Symposium on Characterization of High-K Dielectric Materials Held at the 2006 E-Mrs Spring Meeting, Date: MAY 29-JUN 02, 2006, Location: Nice, FRANCE, Sponsors: European Mat Res Soc
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Publication Identifiers
SCOPUS: 2-s2.0-33846115181
Wos: WOS:000244261600049
Source Identifiers
ISSN: 1369-8001
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