in NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, ISSN: 0168-583X
Volume: 253, Issue: 1-2, Pages: 167-171 (5)
Conference
Symposium on Si-Bases Materials for Advanced Microelectronic Devices Held at the 2006 E-Mrs Spring Meeting, Date: MAY 29-JUN 02, 2006, Location: Nice, FRANCE, Sponsors: European Mat Res Soc, IUMRS, ICEM
