Electrostatically Actuated Resonance of Amorphous Silicon Microresonators in Water

AuthID
 P-004-GNB
3
Author(s)
·
Document Type
Article
Year published
2006
Published
in APPLIED PHYSICS LETTERS, ISSN: 0003-6951
Volume: 89, Issue: 14, Pages: 143109 (3)
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Publication Identifiers
SCOPUS: 2-s2.0-33749476303
Wos: WOS:000241056900099
Source Identifiers
ISSN: 0003-6951
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