Residual Stress Minimum in Nanocrystalline Diamond Films

AuthID
 P-004-HW4
6
Author(s)
Document Type
Article
Year published
2006
Published
in APPLIED PHYSICS LETTERS, ISSN: 0003-6951
Volume: 89, Issue: 9, Pages: 093109 (3)
Indexing
Wos®
Scopus®
Crossref®16
Google Scholar®
Publication Identifiers
Scopus: 2-s2.0-33748255714
Wos: WOS:000240236600099
Source Identifiers
ISSN: 0003-6951
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