The Structure and Hardness of Magnetron Sputtered Ti-Al-N Thin Films with Low N Contents (< 42 At.%)

AuthID
 P-004-K5B
6
Author(s)
Manaia, A
·
Teer, D
·
Taylor, S
Document Type
Article
Year published
2006
Published
in SURFACE & COATINGS TECHNOLOGY, ISSN: 0257-8972
Volume: 200, Issue: 22-23, Pages: 6583-6587 (5)
Conference
Symposium on Protective Coatings and Thin Films Held at the E-Mrs Spring Meeting, Date: MAY 31, 2004-JUN 03, 2005, Location: Strasbourg, FRANCE, Sponsors: E-MRS
Indexing
Wos®
Scopus®
Crossref®15
Google Scholar®
Publication Identifiers
Scopus: 2-s2.0-33748164033
Wos: WOS:000237842300082
Source Identifiers
ISSN: 0257-8972
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