Study of the Out-Of-Plane Vibrational Modes in Thin-Film Amorphous Silicon Micromechanical Disk Resonators

AuthID
 P-005-0SN
3
Author(s)
Gualdino, A
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Document Type
Article
Year published
2013
Published
in JOURNAL OF APPLIED PHYSICS, ISSN: 0021-8979
Volume: 113, Issue: 17, Pages: 174904 (8)
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Publication Identifiers
SCOPUS: 2-s2.0-84877740571
Wos: WOS:000319292800396
Source Identifiers
ISSN: 0021-8979
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