Influence of Process Parameters on the Rf Sputtered Gap Thin Films

AuthID
 P-006-7N8
5
Author(s)
Mota, DA
·
Document Type
Article
Year published
2013
Published
in JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY, ISSN: 1005-0302
Volume: 29, Issue: 9, Pages: 821-829 (9)
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Publication Identifiers
SCOPUS: 2-s2.0-84881222831
Wos: WOS:000324164900007
Source Identifiers
ISSN: 1005-0302
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