Effect of Rapid Thermal Annealing on the Composition of Au/Ti/Al/Ti Ohmic Contacts for Gan-Based Microdevices

AuthID
 P-006-9N9
5
Author(s)
Ynsa, MD
·
Romero, MF
·
Munoz, E
Document Type
Article
Year published
2013
Published
in NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, ISSN: 0168-583X
Volume: 306, Pages: 212-217 (6)
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Publication Identifiers
SCOPUS: 2-s2.0-84879029747
Wos: WOS:000321085900044
Source Identifiers
ISSN: 0168-583X
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