Construction and Performance of a Magnetron Sputtering Apparatus

AuthID
 P-007-4CZ
4
Author(s)
Ferreira, MIC
·
Santos, MP
·
Document Type
Article
Year published
1986
Published
in Nuclear Inst. and Methods in Physics Research, B, ISSN: 0168-583X
Volume: 18, Issue: 1-6, Pages: 651-654
Indexing
Scopus®
Publication Identifiers
SCOPUS: 2-s2.0-0022664281
Source Identifiers
ISSN: 0168-583X
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