Planar Magnetron Discharge for Copper Metallisation

AuthID
 P-007-4Y1
5
Author(s)
Massa, PAA
·
Escrivao, ML
·
Document Type
Article
Year published
1989
Published
in Vacuum, ISSN: 0042-207X
Volume: 39, Issue: 7-8, Pages: 862
Conference
Selected Proceedings of the 1St Iberian Meeting on Vacuum and Its Applications, Date: 28 September 1988 through 1 October 1988, Location: Braga, Port
Indexing
Scopus®
Publication Identifiers
SCOPUS: 2-s2.0-0024939144
Source Identifiers
ISSN: 0042-207X
Export Publication Metadata
Marked List
 Add to Marked List
Info
At this moment we don't have any links to full text documens.

A place for researchers and their institutions

Useful Links

Get Help

© 2024 CRACS & Inesc TEC - All Rights Reserved Privacy Policy | Terms of Service