Amorphous-To-Microcrystalline Silicon Transition in Hot-Wire Chemical Vapor Deposition

AuthID
 P-007-6S0
3
Author(s)
1
Editor(s)
Hack MichaelSchiff Eric A.Madan ArunPowell MartinMatsuda Akihisa
Document Type
Proceedings Paper
Year published
1995
Published
in Materials Research Society Symposium - Proceedings, ISSN: 0272-9172
Volume: 377, Pages: 57-62
Conference
Proceedings of the 1995 Mrs Spring Meeting, Date: 18 April 1995 through 21 April 1995, Location: San Francisco, CA, USA, Sponsors: MRS
Indexing
Scopus®
Publication Identifiers
SCOPUS: 2-s2.0-0029519780
Source Identifiers
ISSN: 0272-9172
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