Direct Observation of Lattice Strain in Si1 - X Gex/Si Crystals Using Planar Channeling Patterns

AuthID
 P-007-7KX
4
Author(s)
De Kerckhove, DG
·
King, PJC
·
Smulders, PJM
Document Type
Article
Year published
1997
Published
in Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, ISSN: 0168-583X
Volume: 132, Issue: 1, Pages: 177-187
Indexing
Scopus®
Publication Identifiers
SCOPUS: 2-s2.0-0031247352
Source Identifiers
ISSN: 0168-583X
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