Influence of the H2 Dilution and Filament Temperature on the Properties of P Doped Silicon Carbide Thin Films Produced by Hot-Wire Technique

AuthID
 P-007-8D3
6
Author(s)
Mendes, L
·
1
Editor(s)
Schropp R.Branz H.M.Hack M.Shimizu I.Wagner S.
Document Type
Proceedings Paper
Year published
1999
Published
in Materials Research Society Symposium - Proceedings, ISSN: 0272-9172
Volume: 507, Pages: 831-836
Conference
Proceedings of the 1998 Mrs Spring Meeting, Date: 14 April 1998 through 17 April 1998, Location: San Francisco, CA, USA, Sponsors: MRS
Indexing
Scopus®
Publication Identifiers
SCOPUS: 2-s2.0-0032678424
Source Identifiers
ISSN: 0272-9172
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