Nanocrystalline Undoped Silicon Films Produce by Hot Wire Plasma Assisted Technique

AuthID
P-007-99E
5
Author(s)
1
Editor(s)
Collins R.W.Branz H.M.Stutzmann M.Guha S.Okamoto H.
Document Type
Proceedings Paper
Year published
2000
Published
in Materials Research Society Symposium - Proceedings, ISSN: 0272-9172
Volume: 609, Pages: A2241-A2246
Conference
Amorphous and Heterogeneus Silicon Thin Films-2000, Date: 24 April 2000 through 28 April 2000, Location: San Francisco, CA
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Publication Identifiers
Scopus: 2-s2.0-0034429772
Source Identifiers
ISSN: 0272-9172
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