Role of Ion Bombardment on the Properties of A-Si : H Films

AuthID
 P-007-9PN
3
Author(s)
Document Type
Article
Year published
2000
Published
in Vacuum, ISSN: 0042-207X
Volume: 60, Issue: 1-2, Pages: 247-254
Indexing
Scopus®
Publication Identifiers
SCOPUS: 2-s2.0-0035157422
Source Identifiers
ISSN: 0042-207X
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