Electromechanical Properties of Amorphous and Microcrystalline Silicon Micromachined Structures

AuthID
 P-007-9VA
4
Author(s)
Gaspar, J
·
Boucinha, M
·
1
Editor(s)
Stutzmann MBoyce JCohen J DCollins RHanna J
Document Type
Proceedings Paper
Year published
2001
Published
in Materials Research Society Symposium - Proceedings, ISSN: 0272-9172
Volume: 664, Pages: A2641-A2646
Conference
Amorphous and Heterogeneous Silicon Based Films 2001, Date: 16 April 2001 through 20 April 2001, Location: San Francisco, CA
Indexing
Scopus®
Publication Identifiers
SCOPUS: 2-s2.0-0035556357
Source Identifiers
ISSN: 0272-9172
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