Silicon Films Produced by Pecvd Under Powder Formation Conditions

AuthID
P-007-9WY
6
Author(s)
Document Type
Proceedings Paper
Year published
2001
Published
in Materials Science Forum, ISSN: 0255-5476
Volume: 382, Pages: 21-28
Conference
4Th European Workshop on Dusty and Colloidal Plasmas, Date: 3 June 2000 through 5 June 2000, Location: Costa da Caparica, Sponsors: Caloust Gulbenkian Foundation;Luso American Foundation for the Development (FLAD);North Atlantic Treat Organisation;NATO-Science for Stability
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Publication Identifiers
Scopus: 2-s2.0-0035689049
Source Identifiers
ISSN: 0255-5476
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