Publications

AuthID
P-007-EFH

Author(s)

Fernandes, AG

Editor(s)

Ottevaere H.DeWolf P.Wiersma D.S.

Document Type

Proceedings Paper

Year published

2005

Published

in Proceedings of SPIE - The International Society for Optical Engineering, ISSN: 0277-786X

Volume: 5858, Pages: 1-8

Conference

Nano- and Micro-Metrology, Date: 16 June 2005 through 17 June 2005, Location: Munich, Sponsors: SPIE Europe

Indexing

Scopus^®

Google Scholar^®

Publication Identifiers

DOI: 10.1117/12.637258

Scopus: 2-s2.0-28844441259

Source Identifiers

ISSN: 0277-786X

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