Mechanical Properties and Reliability of Amorphous Vs. Polycrystalline Silicon Thin Films

AuthID
 P-007-PW4
4
Author(s)
Gaspar, J
·
Paul, O
·
5
Editor(s)
Nathan, A; Flewitt, A; Hou, J; Miyazaki, S; Yang, J
Document Type
Proceedings Paper
Year published
2008
Published
in AMORPHOUS AND POLYCRYSTALLINE THIN-FILM SILICON SCIENCE AND TECHNOLOGY-2008 in Materials Research Society Symposium Proceedings, ISSN: 0272-9172
Volume: 1066, Pages: 339-344 (6)
Conference
Symposium on Amorphous and Polycrystalline Thin-Film Silicon Science and Technology Held at the 2008 Mrs Spring Meeting, Date: MAR 25-28, 2008, Location: San Francisco, CA
Indexing
Wos®
Scopus®
Publication Identifiers
SCOPUS: 2-s2.0-62949245338
Wos: WOS:000261398700048
Source Identifiers
ISSN: 0272-9172
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