A Rigorous Mathematical Formulation to Automated Wet-Etch Station Scheduling with Multiple Material-Handling Robots in Semiconductor Manufacturing Systems

AuthID
 P-007-YR9
3
Author(s)
Aguirre, AM
·
Mendez, CA
·
Document Type
Book
Year published
2011
Published
in Computer Aided Chemical Engineering, ISSN: 1570-7946
Volume: 29, Pages: 990-994
Indexing
Scopus®
Crossref®
Google Scholar®
Publication Identifiers
Scopus: 2-s2.0-79959214449
Source Identifiers
ISSN: 1570-7946
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