A Novel Soi-Mems "Micro-Swing" Time-Accelerometer Operating in Two Time-Based Transduction Modes for High Sensitivity and Extended Range

AuthID
P-007-ZXS
6
Author(s)
Rajaraman, V
·
Hau, BS
·
Dekker, R
Document Type
Proceedings Paper
Year published
2011
Published
in 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
Pages: 2066-2069
Conference
2011 16Th International Solid-State Sensors, Actuators and Microsystems Conference, Transducers'11, Date: 5 June 2011 through 9 June 2011, Location: Beijing
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Publication Identifiers
SCOPUS: 2-s2.0-80052126623
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