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Thin Film Amorphous Silicon Bulk-Mode Disk Resonators Fabricated on Glass Substrates
AuthID
P-008-0FE
3
Author(s)
Gualdino, A
·
Chu, V
·
Conde, JP
Document Type
Proceedings Paper
Year published
2011
Published
in
Materials Research Society Symposium Proceedings,
ISSN: 0272-9172
Volume: 1299, Pages: 141-146
Conference
2010 Mrs Fall Meeting,
Date:
29 November 2010 through 3 December 2010,
Location:
Boston, MA
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®
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Metadata
Sources
Publication Identifiers
DOI
:
10.1557/opl.2011.62
SCOPUS
: 2-s2.0-80053218597
Source Identifiers
ISSN
: 0272-9172
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