Influence of Microstructural Factors on the Dielectric Properties of Multilayered Mgtio3-Srtio3 Thin Films on Pt/Tio 2/Sio2/(100)Si Substrates

AuthID
 P-008-BWW
4
Author(s)
Wu, A
·
Document Type
Proceedings Paper
Year published
2008
Published
in 4th IMAPS/ACerS International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies 2008, CICMT 2008
Pages: 442-448
Conference
4Th International Conference on Ceramic Interconnect and Ceramic Microsystems Technologies, Cicmt 2008, Date: 21 April 2008 through 24 April 2008, Location: Munich, Sponsors: International Microelectronics and Packaging Society (IMAPS);The American Ceramic Society (ACerS)
Indexing
Scopus®
Publication Identifiers
SCOPUS: 2-s2.0-84880088436
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