Surface Nanopatterns on Si(100) by Normal-Incidence Ion Sputtering with Simultaneous Metal Incorporation

AuthID
P-008-CX7
4
Author(s)
Gago, R
·
Sanchez Garcia, JA
·
Vazquez, L
Document Type
Book Chapter
Year published
2012
Published
in Nanofabrication by Ion-Beam Sputtering: Fundamentals and Applications
Pages: 163-193
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Publication Identifiers
SCOPUS: 2-s2.0-84881860703
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