in GETTERING AND DEFECT ENGINEERING IN SEMICONDUCTOR TECHNOLOGY XV in Solid State Phenomena, ISSN: 1012-0394
Volume: 205-206, Pages: 181-+ (3)
Conference
15Th International Conference on Gettering and Defect Engineering in Semiconductor Technology (Gadest), Date: SEP 22-27, 2013, Location: St Johns Coll, Oxford, ENGLAND, Sponsors: European Mat Res Soc, Host: St Johns Coll