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Compensation of Temperature Effects on the Pull-In Voltage of Microstructures

AuthID
P-008-PDV

Author(s)

Rocha, LA

Cretu, E

Wolffenbuttel, RF

Document Type

Article

Year published

2004

Published

in SENSORS AND ACTUATORS A-PHYSICAL, ISSN: 0924-4247

Volume: 115, Issue: 2-3, Pages: 351-356 (6)

Conference

17Th European Conference on Solid-State Transducers (Eurosensors Xvii), Date: SEP 21-24, 2003, Location: Guimaraes, PORTUGAL, Host: Univ Minho

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Publication Identifiers

DOI: 10.1016/j.sna.2004.03.075

SCOPUS: 2-s2.0-4544299705

Wos: WOS:000224141500025

Source Identifiers

ISSN: 0924-4247

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Compensation of Temperature Effects on the Pull-In Voltage of Microstructures

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