Pb(Zr,Ti)O-3 Thin Films on Zirconium Membranes for Micromechanical Applications

AuthID
 P-008-RTK
7
Author(s)
Maeder, T
·
Muralt, P
·
Sagalowicz, L
·
Reaney, I
·
Kohli, M
·
Setter, N
Document Type
Article
Year published
1996
Published
in APPLIED PHYSICS LETTERS, ISSN: 0003-6951
Volume: 68, Issue: 6, Pages: 776-778 (3)
Indexing
Wos®
Scopus®
Crossref®36
Google Scholar®
Publication Identifiers
Scopus: 2-s2.0-36449006814
Wos: WOS:A1996TT66300017
Source Identifiers
ISSN: 0003-6951
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