Improving the Thermal Stability of Photoresist Films by Ion Beam Irradiation

AuthID
 P-008-TW2
8
Author(s)
Zawislak, FC
·
Garcia Irene, TS
·
Samios, D
·
Baptista, DL
·
Fichtner, PFP
·
Da Silva Maria, F
·
Document Type
Proceedings Paper
Year published
1999
Published
in Materials Research Society Symposium - Proceedings, ISSN: 0272-9172
Volume: 504, Pages: 443-448
Conference
Proceedings of the 1997 Mrs Fall Symposium, Date: 1 December 1997 through 2 December 1997, Location: Boston, MA, USA, Sponsors: MRS
Indexing
Scopus®
Publication Identifiers
Scopus: 2-s2.0-0032651394
Source Identifiers
ISSN: 0272-9172
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