Lattice Sites and Stability of Implanted Er in Fz and Cz Si

AuthID
P-008-X9X
4
Author(s)
Langouche, G
·
Vantomme, A
1
Group Author(s)
ISOLDE collaboration
3
Editor(s)
Polman, A; Coffa, S; Soref, R
Document Type
Proceedings Paper
Year published
1998
Published
in MATERIALS AND DEVICES FOR SILICON-BASED OPTOELECTRONICS in MATERIALS RESEARCH SOCIETY SYMPOSIUM PROCEEDINGS, ISSN: 0272-9172
Volume: 486, Pages: 269-274 (6)
Conference
Symposium on Materials and Devices for Silicon-Based Optoelectronics, at the 1997 Mrs Fall Meeting, Date: DEC 01-03, 1997, Location: BOSTON, MA, Sponsors: Mat Res Soc, Italian CNR, SGS Thomson Microelectr, Texas Instruments
Indexing
Publication Identifiers
Scopus: 2-s2.0-0031633141
Wos: WOS:000075187000036
Source Identifiers
ISSN: 0272-9172
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