Changes in Structure and Composition of Silicon Oxide Thin Films Induced by Ultraviolet Illumination

AuthID
 P-008-YDS
8
Author(s)
Parada, EG
·
Gonzalez, P
·
Leon, B
·
Perez Amor, M
·
Da Silva, MF
·
Fernandez, A
·
Gonzalez Elipe, R
Document Type
Proceedings Paper
Year published
1997
Published
in Materials Research Society Symposium - Proceedings, ISSN: 0272-9172
Volume: 441, Pages: 211-216
Conference
Proceedings of the 1996 Mrs Fall Meeting, Date: 2 December 1996 through 6 December 1996, Location: Boston, MA, USA, Sponsors: MRS
Indexing
Scopus®
Publication Identifiers
Scopus: 2-s2.0-0030684487
Source Identifiers
ISSN: 0272-9172
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