Micromachined Fabry-Perot Optical Filters

AuthID
 P-008-YJB
3
Author(s)
4
Editor(s)
Breza, J; Donoval, D; Drobny, V; Uherek, F
Document Type
Proceedings Paper
Year published
1998
Published
in ASDAM'98, SECOND INTERNATIONAL CONFERENCE ON ADVANCED SEMICONDUCTOR DEVICES AND MICROSYSTEMS, CONFERENCE PROCEEDINGS
Pages: 283-286 (4)
Conference
2Nd International Conference on Advanced Semiconductor Devices and Microsystems (Asdam 98), Date: OCT 05-07, 1998, Location: SMOLENICE CASTLE, SLOVAKIA, Sponsors: Slovak Univ Technol Dept Microelectr, Inst Elect Engn, Slovak Acad Sci, Inst Comp Syst, Slovak Acad Sci, Ctr Advancement Sci & Technol, Minist Educ Slovak Republ, Fac Electr Engn & Informat Technol, PROMOS Fdn, IEEE Electron Devices Soc, SIEMENS Slovakia, Motorola, Philips, Euro Comp Bratislava
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Wos: WOS:000078437200066
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