Silicide Epilayers: Recent Developments and Prospects for a Si-Compatible Technology

AuthID
 P-009-57K
6
Author(s)
Derrien, J
·
Le Thanh, V
·
Natoli, JY
·
Berbezier, I
Document Type
Article
Year published
1993
Published
in Applied Surface Science, ISSN: 0169-4332
Volume: 70-71, Issue: PART 2, Pages: 546-558
Indexing
Scopus®
Publication Identifiers
Scopus: 2-s2.0-0344455393
Source Identifiers
ISSN: 0169-4332
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