Tunable Properties of Hydrogenated Amorphous/Nanocrystalline Silicon Thin-Films for Enhanced Mems Resonators Performance

AuthID
 P-009-HFF
4
Author(s)
Mouro, J
·
Gualdino, A
·
Document Type
Article
Year published
2014
Published
in JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, ISSN: 1057-7157
Volume: 23, Issue: 3, Pages: 600-609 (10)
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Publication Identifiers
SCOPUS: 2-s2.0-84901913679
Wos: WOS:000337128200016
Source Identifiers
ISSN: 1057-7157
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