Gas Viscosity Sensing Based on the Electrostatic Pull-In Time of Microactuators

AuthID
 P-009-PHR
4
Author(s)
de Graaf, G
·
Document Type
Article
Year published
2014
Published
in SENSORS AND ACTUATORS A-PHYSICAL, ISSN: 0924-4247
Volume: 216, Pages: 376-385 (10)
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Publication Identifiers
SCOPUS: 2-s2.0-84904704768
Wos: WOS:000340012700050
Source Identifiers
ISSN: 0924-4247
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