Permeation Barrier Performance of Hot Wire-Cvd Grown Silicon-Nitride Films Treated by Argon Plasma

AuthID
 P-00A-5B7
8
Author(s)
Vanel, JC
·
Bonnassieux, Y
·
Bouree, JE
Document Type
Article
Year published
2015
Published
in THIN SOLID FILMS, ISSN: 0040-6090
Volume: 575, Pages: 72-75 (4)
Indexing
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Scopus®
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Publication Identifiers
SCOPUS: 2-s2.0-84922343476
Wos: WOS:000349372900018
Source Identifiers
ISSN: 0040-6090
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