Tailoring the Nanostructure of Ti-Si-N Thin Films by Hipims in Deep Oscillation Magnetron Sputtering (Doms) Mode

AuthID
 P-00A-5ZS
4
Author(s)
Ferreira, F
·
Document Type
Article
Year published
2015
Published
in SURFACE & COATINGS TECHNOLOGY, ISSN: 0257-8972
Volume: 264, Pages: 140-149 (10)
Indexing
Wos®
Scopus®
Crossref®16
Google Scholar®
Publication Identifiers
SCOPUS: 2-s2.0-84922895843
Wos: WOS:000350090600019
Source Identifiers
ISSN: 0257-8972
Export Publication Metadata
Marked List
 Add to Marked List
Info
At this moment we don't have any links to full text documens.

A place for researchers and their institutions

Useful Links

Get Help

© 2024 CRACS & Inesc TEC - All Rights Reserved Privacy Policy | Terms of Service