Tailoring the Nanostructure of Ti-Si-N Thin Films by Hipims in Deep Oscillation Magnetron Sputtering (Doms) Mode

AuthID
 P-00A-5ZS
4
Author(s)
Ferreira, F
·
Document Type
Article
Year published
2015
Published
in SURFACE & COATINGS TECHNOLOGY, ISSN: 0257-8972
Volume: 264, Pages: 140-149 (10)
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Wos®
Scopus®
Crossref®16
Google Scholar®
Publication Identifiers
Scopus: 2-s2.0-84922895843
Wos: WOS:000350090600019
Source Identifiers
ISSN: 0257-8972
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