Full-Gap Tracking System for Parallel-Plate Electrostatic Microactuatores

AuthID
 P-00A-9NM
6
Author(s)
2
Editor(s)
Sberveglieri, G; Ferrari, V
Document Type
Proceedings Paper
Year published
2014
Published
in 28TH EUROPEAN CONFERENCE ON SOLID-STATE TRANSDUCERS (EUROSENSORS 2014) in Procedia Engineering, ISSN: 1877-7058
Volume: 87, Pages: 1386-1389 (4)
Conference
28Th European Conference on Solid-State Transducers (Eurosensors), Date: SEP 07-10, 2014, Location: Brescia, ITALY, Sponsors: Natl Res Council, AISEM
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Publication Identifiers
SCOPUS: 2-s2.0-84923378407
Wos: WOS:000369531700335
Source Identifiers
ISSN: 1877-7058
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