Low Temperature High K Dielectric on Poly-Si Tfts

AuthID
P-00F-HTJ
Document Type
Article
Year published
2008
Published
in Journal of Non-Crystalline Solids, ISSN: 0022-3093
Volume: 354, Issue: 19-25, Pages: 2534-2537
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Publication Identifiers
SCOPUS: 2-s2.0-43049138408
Source Identifiers
ISSN: 0022-3093
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