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Low Temperature High K Dielectric on Poly-Si Tfts
AuthID
P-00F-HTJ
4
Author(s)
Pereira, L
·
Barquinha, P
·
Fortunato, E
·
Martins, R
Document Type
Article
Year published
2008
Published
in
Journal of Non-Crystalline Solids,
ISSN: 0022-3093
Volume: 354, Issue: 19-25, Pages: 2534-2537
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Publication Identifiers
DOI
:
10.1016/j.jnoncrysol.2007.09.036
SCOPUS
: 2-s2.0-43049138408
Source Identifiers
ISSN
: 0022-3093
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