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Squeezed Film Damping Measurements on a Parallel-Plate Mems in the Free Molecule Regime

AuthID
P-00F-J4H

Author(s)

Mol, L

Rocha, LA

Cretu, E

Wolffenbuttel, RF

Document Type

Proceedings Paper

Year published

2009

Published

in TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Pages: 1425-1428

Conference

Transducers 2009 - 15Th International Conference on Solid-State Sensors, Actuators and Microsystems, Date: 21 June 2009 through 25 June 2009, Location: Denver, CO

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Publication Identifiers

DOI: 10.1109/sensor.2009.5285840

SCOPUS: 2-s2.0-71449094745

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Squeezed Film Damping Measurements on a Parallel-Plate Mems in the Free Molecule Regime

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Squeezed Film Damping Measurements on a Parallel-Plate Mems in the Free Molecule Regime

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