Deposition of Pzt Thin Film onto Copper-Coated Polymer Films by Mean of Pulsed-Dc and Rf-Reactive Sputtering

AuthID
P-00F-JAW
11
Author(s)
Suchaneck, G
·
Jastrabik, L
·
Adamek, P
·
Hubicka, Z
·
Kiselev, DA
·
Gerlach, G
·
Dejneka, A
Document Type
Article
Year published
2011
Published
in Surface and Coatings Technology, ISSN: 0257-8972
Volume: 205, Issue: SUPPL. 2, Pages: S241-S244
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Publication Identifiers
Scopus: 2-s2.0-79959804279
Source Identifiers
ISSN: 0257-8972
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