in SHALLOW IMPURITIES IN SEMICONDUCTORS in MATERIALS SCIENCE FORUM, ISSN: 0255-5476
Volume: 117, Pages: 375-380 (6)
Conference
5Th International Conf On Shallow Impurities In Semiconductors : Physics And Control Of Impurities, Date: AUG 05-08, 1992, Location: KOBE, JAPAN, Sponsors: PORTOPIA EIGHTY ONE MEM FDN, FUJITSU, HITACHI, IBM JAPAN, JAPAN BROADCASTING CORP, KOBE STEEL, KOMATSU ELECTR MET, MATSUSHITA ELECT IND, MITSUBISHI ELECT CORP, NIPPON MIN CO
