Publications

Bulk and Surface Properties of Amorphous Hydrogenated Fluorinated Silicon Grown from Sif4 and H2

AuthID
P-00F-MRJ

Author(s)

Maruyama, A

Shen Dashen, S

Chu, V

Liu, JZ

Campbell, I

Fauchet Phillipe, M

Wagner, S

Document Type

Article

Year published

1989

Published

in IEEE Transactions on Electron Devices, ISSN: 0018-9383

Volume: 36, Issue: 12, Pages: 2853-2858

Conference

International Topical Conference on Hydrogenated Amorphous Silicon Devices and Technology, Date: 1 November 1988 through 1 November 1988, Location: Yorktown Heights, NY, USA

Indexing

Scopus^®

Crossref^®

Google Scholar^®

Metadata
Sources

Publication Identifiers

DOI: 10.1109/16.40946

SCOPUS: 2-s2.0-0024923603

Source Identifiers

ISSN: 0018-9383

Export Publication Metadata

Marked List

Add to Marked List

Info

At this moment we don't have any links to full text documens.

Bulk and Surface Properties of Amorphous Hydrogenated Fluorinated Silicon Grown from Sif4 and H2

Useful Links

Get Help

Federated Authentication (Click on the image)

Bulk and Surface Properties of Amorphous Hydrogenated Fluorinated Silicon Grown from Sif4 and H2

Useful Links

Get Help