Injection Doping of Ultrathin Microcrystalline Silicon Films Prepared by Cc-Cvd

AuthID
 P-00F-NQX
7
Author(s)
Grebner, S
·
Vassilev, L
·
Sieber, I
·
Schmidt, M
·
Fuhs, W
Document Type
Proceedings Paper
Year published
1997
Published
in Materials Research Society Symposium - Proceedings, ISSN: 0272-9172
Volume: 467, Pages: 307-312
Conference
Proceedings of the 1997 Mrs Spring Symposium, Date: 31 March 1997 through 4 April 1997, Location: San Francisco, CA, USA, Sponsors: MRS
Indexing
Scopus®
Publication Identifiers
SCOPUS: 2-s2.0-0031356135
Source Identifiers
ISSN: 0272-9172
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