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Backscattering/Channeling Study of High-Dose Rare-Earth Implants into Si
AuthID
P-00F-NVW
7
Author(s)
Vantomme, A
·
Wahl, U
·
Wu, MF
·
Hogg, S
·
Pattyn, H
·
Langouche, G
·
Bender, H
Document Type
Article
Year published
1998
Published
in
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS,
ISSN: 0168-583X
Volume: 136, Pages: 471-477 (7)
Conference
13Th International Conference on Ion Beam Analysis (Iba-13),
Date:
JUL 27-AUG 01, 1997,
Location:
LISBON, PORTUGAL
Indexing
Wos
®
Scopus
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®
Metadata
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Publication Identifiers
DOI
:
10.1016/s0168-583x(97)00719-2
Scopus
: 2-s2.0-0032017153
Wos
: WOS:000074380400083
Source Identifiers
ISSN
: 0168-583X
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