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Compositional Characterization of Silicon Nitride Thin Films Prepared by Rf-Sputtering
AuthID
P-00F-Q2Z
8
Author(s)
Vila, M
·
Martin Gago, JA
·
Munoz Martin, A
·
Prieto, C
·
Miranzo, P
·
Osendi, MI
·
Garcia Lopez, J
·
Respaldiza, MA
Document Type
Proceedings Paper
Year published
2002
Published
in
Vacuum,
ISSN: 0042-207X
Volume: 67, Issue: 3-4, Pages: 513-518
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Publication Identifiers
DOI
:
10.1016/s0042-207x(02)00221-x
SCOPUS
: 2-s2.0-0037179736
Source Identifiers
ISSN
: 0042-207X
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