Compositional Characterization of Silicon Nitride Thin Films Prepared by Rf-Sputtering

AuthID
P-00F-Q2Z
8
Author(s)
Martin Gago, JA
·
Munoz Martin, A
·
Prieto, C
·
Miranzo, P
·
Osendi, MI
·
Garcia Lopez, J
·
Respaldiza, MA
Document Type
Proceedings Paper
Year published
2002
Published
in Vacuum, ISSN: 0042-207X
Volume: 67, Issue: 3-4, Pages: 513-518
Indexing
Publication Identifiers
SCOPUS: 2-s2.0-0037179736
Source Identifiers
ISSN: 0042-207X
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