Mechanical Properties of Sputtered Silicon Nitride Thin Films

AuthID
P-00F-QMJ
3
Author(s)
Caceres, D
·
Prieto, C
Document Type
Article
Year published
2003
Published
in Journal of Applied Physics, ISSN: 0021-8979
Volume: 94, Issue: 12, Pages: 7868-7873
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Publication Identifiers
SCOPUS: 2-s2.0-0346935132
Source Identifiers
ISSN: 0021-8979
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