A Plasmatron with Interelectrode Inserts for Depositing Diamond and Diamond-Like Films

AuthID
 P-00F-R4V
2
Author(s)
Sazonov, MI
·
Document Type
Article
Year published
2005
Published
in Instruments and Experimental Techniques, ISSN: 0020-4412
Volume: 48, Issue: 2, Pages: 266-269
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Publication Identifiers
Scopus: 2-s2.0-18644381650
Source Identifiers
ISSN: 0020-4412
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