High-Resolution Mems Inclinometer Based on Pull-In Voltage

AuthID
 P-00G-2PK
5
Author(s)
Dias R., A
·
Cabral J., M
·
Gaspar, J
·
Document Type
Article in Press
Year published
2014
Published
in Journal of Microelectromechanical Systems, ISSN: 1057-7157
Indexing
Scopus®
Google Scholar®
Publication Identifiers
Scopus: 2-s2.0-84908042842
Source Identifiers
ISSN: 1057-7157
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