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Laminar Auger-Analysis of Super-High Resolution. Problem of Minimization of Device Errors
AuthID
P-00G-90Y
6
Author(s)
Drozdov, MN
·
Daniltsev, VM
·
Salashchenko, NN
·
Polushkin, NI
·
Khrykin, OI
·
Shashkin, VI
Document Type
Article
Year published
1995
Published
in
PISMA V ZHURNAL TEKHNICHESKOI FIZIKI,
ISSN: 0320-0116
Volume: 21, Issue: 18, Pages: 1-7 (7)
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Wos
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Wos
: WOS:A1995TM36600001
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ISSN
: 0320-0116
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