High-Resolution Mems Inclinometer Based on Pull-In Voltage

AuthID
 P-00G-F1A
5
Author(s)
Alves, FS
·
Gaspar, J
·
Document Type
Article
Year published
2015
Published
in JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, ISSN: 1057-7157
Volume: 24, Issue: 4, Pages: 931-939 (9)
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Publication Identifiers
SCOPUS: 2-s2.0-84938568718
Wos: WOS:000358952600020
Source Identifiers
ISSN: 1057-7157
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